Resonant Network Antennas for Radio-Frequency Plasma Sources: Theory, technology and applications - Paperback
Resonant Network Antennas for Radio-Frequency Plasma Sources: Theory, technology and applications - Paperback
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by Philippe Guittienne (Author), Alan Howling (Author), Ivo Furno (Author)
Resonant network antennas can overcome the limitations of conventional RF plasma sources. Their intense currents at resonance are well suited for inductive coupling in novel reactor configurations. This reference text explains the complete theory of resonant antennas, from fundamental circuits to mutual partial inductance coupling with plasma, and helicon wave theory.
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